胡亂寫寫的東西

ABSTRACT
This paper presents the design, fabrication and measurement
results of a dual-axis electromagnetic scanning micromirror
utilizing radial magnetic field. The scanner is comprised of a
gimbaled single-crystal-silicon micromirror with a single
turn electroplated metal coil, assembled passively above a
concentric permanent magnet assembly. Proposed scanner
utilizes the radial magnetic field rather than using the
magnetic field oriented 45° to the horizontal and vertical
scan axes to achieve a biaxial magnetic actuation[1,2].
Forced actuation of the gimbal and resonant actuation of the
micromirror provide slow vertical scan and fast horizontal
scan respectively. A dual-axis scanner with maximum scan
angle of 16.1°, mirror size of 1.5mm in diameter, and resonant
frequency of 19.7kHz is reported.