胡亂寫寫的東西

Abstract
We present arrays of electrostatically actuated piston-tip-tilt micromirrors realized using a surface micromachining 3-structural-layer polysilicon process. High fill factor, flat mirrors 120 lm in size have mechanical response in the order of 10 ls, with ±4 mechanical tip
and tilt and 5 lm piston continuous, controllable range under 110 V. The actuator design is based on four dual in-plane comb drives with 0.5 lm critical feature size and high aspect ratio. We show a modular approach to fabricate these arrays, allowing multiple array sizes
(642 and 2562 mirrors) and four different designs to be implemented in three DUV masks per lithography level.

優點：三軸維度，大位移，快速反應時間
缺點：需要較高的驅動電壓(110v)來驅動

Reference:
Flavio Pardo *, R.A. Cirelli, E.J. Ferry, W.Y.-C. Lai, F.P. Klemens, J.F. Miner, C.S. Pai, J.E. Bower, W.M. Mansfield, A. Kornblit, T.W. Sorsch, J.A. Taylor, M.R. Baker, R. Fullowan, M.E. Simon, V.A. Aksyuk, R. Ryf, H. Dyson, S. Arney,"Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators", Microelectronic Engineering 84 (2007) 1157–1161.